The SK-60B/80B is a spinner that has been developed with the emphasis on operation ease and high throughput. In spite of its compact design, the SK-60B/80B offers you outstanding processing capabilities. Wafer transfer speed has been increased for higher productivity. Process Performance and cleanliness have been upgraded to maintain high yield. Dedicated panels and various new software features designed for easier operation and maintenance have been added on, increased automation has been achieved, and parts have been reduced and standardized. What's more, the system can be configured flexibly, and necessary processing units can be incorporated in limited equipment internal space. 1. A high-speed indexer and a faster wafer transfer unit ensure higher throughput. A flexible flow function ensures that wafers having different flow are continuously processed with maximum efficiency. 2. Outstanding mechanisms assure you of total cleanliness: particle-free stationary cassette type indexer, clean transfer system, automatic cup cleaning function, baffle disk in the spin coater, and piping that uses neither sealing tape nor metal parts. 3. The SK-60B/80B incorporates the 4-stage oven made popular in the D-SPIN Series. This allows the spinner to be designed 20% smaller than our previous model. An edge bead exposure unit and chemical temperature control units can also be built into oven unit space, allowing the effective use of limited space. 4. A wide range of new mechanisms have been added on for improving process performance and accuracy. 5. Simplified Keyboard operation, maintenance- and chemical controldedicated operation panels, fewer parts and use of standardized parts greatly improve ease of operation and maintenance.