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15th Annual SOKUDO Lithography Breakfast Forum
"Double Patterning Challenges"
Date: Wednesday, July 16, 2008
Location: Marriott San Francisco, Yerba Buena Salon 9
55 Fourth Street (at Mission St. intersection)
San Francisco, California
http://www.marriott.com/hotels/travel/sfodt-san-francisco-marriott/
Program: 07:15am Breakfast & Poster Preview
08:00am Forum Presentations
10:00am Poster Session
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This year's theme "Double Patterning Challenges" featured perspectives from semiconductor manufacturer AMD as well as lithography equipment (ASML, Nikon, Canon); materials (JSR, FujiFilm, AZ); coat/develop track (SOKUDO); and related double patterning process (Applied Materials) market players. Forum presentations were followed by a poster session and opportunity for individual question-and-answer engagement with company representatives.
For more details see on-line SEMICONDUCTOR INTERNATIONAL article "Double Patterning Battles Cost, Complexity" by Aaron Hand: http://www.semiconductor.net/article/CA6579281.html?industryid=47299

Presentation Files
Annual Lithography Breakfast Forum
Presentations from Previous Forums
2007 2006 2005 2004 2003
Mark your calendars now for the...
16th Annual Sokudo Lithography Breakfast Forum
Wednesday, July 15th, 2009 at the San Francisco Marriott
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